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Displaying Record for Publication: Materials Science in Semiconductor Processing
Entry Type | Active Serial |
Title | Materials Science in Semiconductor Processing |
Abbreviated Title | Mater. Sci. Semicond. Process. |
CODEN | MSSPFQ |
ISSN | 1369-8001 |
Language of Text | English |
Summaries In | English |
History | v1 n1 Apr. 1998+ |
Publication Notes | v1 n1 and n2 pub. in Solid-State Electron., which see; Avail. from Internet at URL: https://www.sciencedirect.com/journal/materials-science-in-semiconductor-processing |
Publisher Name | Elsevier Ltd. |
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