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Displaying Record for Publication: Journal of Vacuum Science & Technology, B: Microelectronics Processing and Phenomena

Entry TypeChanged Title Serial
TitleJournal of Vacuum Science & Technology, B: Microelectronics Processing and Phenomena
Abbreviated TitleJ. Vac. Sci. Technol., B: Microelectron. Process. Phenom.
CODENJVTBD9
ISSN0734-211X
Former Title Note(s)Supersedes in part
Former Title(s)Journal of Vacuum Science and Technology (New York, NY, United States)
Language of TextEnglish
Summaries InEnglish
Historys2 v1 n1 Jan./Mar. 1983-s2 v8 n6 Nov./Dec. 1990
Publisher NameAmerican Institute of Physics
Successor Title NoteChanged to
Successor Title(s)Journal of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures--Processing, Measurement, and Phenomena
Alternate Title(s) Journal of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures (1983-1990)
Abbreviated Alternate Title(s) J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct. (1983-1990)
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