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Displaying Record for Publication: Journal of Vacuum Science & Technology, B: Microelectronics Processing and Phenomena
Entry Type | Changed Title Serial |
Title | Journal of Vacuum Science & Technology, B: Microelectronics Processing and Phenomena |
Abbreviated Title | J. Vac. Sci. Technol., B: Microelectron. Process. Phenom. |
CODEN | JVTBD9 |
ISSN | 0734-211X |
Former Title Note(s) | Supersedes in part |
Former Title(s) | Journal of Vacuum Science and Technology (New York, NY, United States) |
Language of Text | English |
Summaries In | English |
History | s2 v1 n1 Jan./Mar. 1983-s2 v8 n6 Nov./Dec. 1990 |
Publisher Name | American Institute of Physics |
Successor Title Note | Changed to |
Successor Title(s) | Journal of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures--Processing, Measurement, and Phenomena |
Alternate Title(s) | Journal of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures (1983-1990) |
Abbreviated Alternate Title(s) | J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct. (1983-1990) |
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