CAS Source Index (CASSI) Search Result
Displaying Record for Publication: Journal of Microlithography, Microfabrication, and Microsystems
Entry Type | Changed Title Serial |
Title | Journal of Microlithography, Microfabrication, and Microsystems |
Abbreviated Title | J. Microlithogr., Microfabr., Microsyst. |
CODEN | JMMMGF |
ISSN | 1537-1646 |
Language of Text | English |
Summaries In | English |
History | v1 n1 Apr. 2002-v5 n4 Dec. 2006 |
Publication Notes | v1 n1 called Premier Issue |
Publisher Name | SPIE |
Successor Title Note | Changed to |
Successor Title(s) | Journal of Micro/Nanolithography, MEMS, and MOEMS |
Alternate Title(s) | JM3 (2002-2006) JM3 (2002-2006) |
Abbreviated Alternate Title(s) | JM3 (2002-2006) JM3 (2002-2006) |
Disclaimer | |
Copyright © 2024 American Chemical Society All Rights Reserved