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Displaying Record for Publication: Journal of Microlithography, Microfabrication, and Microsystems

Entry TypeChanged Title Serial
TitleJournal of Microlithography, Microfabrication, and Microsystems
Abbreviated TitleJ. Microlithogr., Microfabr., Microsyst.
CODENJMMMGF
ISSN1537-1646
Language of TextEnglish
Summaries InEnglish
Historyv1 n1 Apr. 2002-v5 n4 Dec. 2006
Publication Notesv1 n1 called Premier Issue
Publisher NameSPIE
Successor Title NoteChanged to
Successor Title(s)Journal of Micro/Nanolithography, MEMS, and MOEMS
Alternate Title(s) JM3 (2002-2006)
JM3 (2002-2006)
Abbreviated Alternate Title(s) JM3 (2002-2006)
JM3 (2002-2006)
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