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Displaying Record for Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS

Entry TypeChanged Title Serial
TitleJournal of Micro/Nanolithography, MEMS, and MOEMS
Abbreviated TitleJ. Micro/Nanolithogr., MEMS, MOEMS
CODENJMMMHG
ISSN1932-5150
Title NotesMEMS = Microelectromechanical Systems
MOEMS = Micro-Opto-Electro-Mechanical Systems
Former Title Note(s)Formerly
Former Title(s)Journal of Microlithography, Microfabrication, and Microsystems
Language of TextEnglish
Summaries InEnglish
Historyv6 n1 2007-v19 n4 Oct. 2020
Publication NotesAvail. from Internet at URL https://www.spiedigitallibrary.org/journals/journal-of-micro-nanopatterning-materials-and-metrology
Publisher NameSPIE
Successor Title NoteChanged to
Successor Title(s)Journal of Micro/Nanopatterning, Materials, and Metrology
Alternate Title(s) JM3 (2007-2020)
JM3 (2007-2020)
Abbreviated Alternate Title(s) JM3 (2007-2020)
JM3 (2007-2020)
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