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Displaying Record for Publication: Journal of Micro/Nanopatterning, Materials, and Metrology

Entry TypeActive Serial
TitleJournal of Micro/Nanopatterning, Materials, and Metrology
Abbreviated TitleJ. Micro/Nanopatterning, Mater., Metrol.
CODENJMMMIH
ISSN2708-8340
Former Title Note(s)Formerly
Former Title(s)Journal of Micro/Nanolithography, MEMS, and MOEMS
Language of TextEnglish
Summaries InEnglish
Historyv20 n1 Jan. 2021-
Publication NotesAvail. from Internet at URL https://www.spiedigitallibrary.org/journals/journal-of-micro-nanopatterning-materials-and-metrology
Publisher NameSPIE
Alternate Title(s) JM3 (2021-)
JM3 (2021-)
Abbreviated Alternate Title(s) JM3 (2021-)
JM3 (2021-)
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