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Displaying Record for Publication: Journal of Vacuum Science and Technology (New York, NY, United States)

Entry TypeChanged Title Serial
TitleJournal of Vacuum Science and Technology (New York, NY, United States)
Abbreviated TitleJ. Vac. Sci. Technol. (N. Y., NY, U. S.)
CODENJVSTAL
ISSN0022-5355
Language of TextEnglish
Summaries InEnglish
Historyv1 n1 Sept./Oct. 1964-v21 n4 Nov./Dec. 1982
Successor Title NoteDivided into
Successor Title(s)Journal of Vacuum Science & Technology, A: Vacuum, Surfaces, and Films
Journal of Vacuum Science & Technology, B: Microelectronics Processing and Phenomena
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